Low Dielectric Constant Materials for IC Applications - Springer Series in Advanced Microelectronics - Paul S Ho - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642632211 - October 4, 2012
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Paul S Ho
Low Dielectric Constant Materials for IC Applications - Springer Series in Advanced Microelectronics Softcover reprint of the original 1st ed. 2003 edition

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Low dielectric constant materials are an important component of microelectronic devices. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability.

329 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 4, 2012
ISBN13 9783642632211
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 310
Dimensions 155 × 235 × 17 mm   ·   467 g
Language German  
Editor Ho, Paul S.
Editor Lee, Wei William
Editor Leu, Jihperng

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