Design and Manufacturing of Active Microsystems - Microtechnology and MEMS - Stephanus Buttgenbach - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642129025 - March 10, 2011
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Stephanus Buttgenbach
Design and Manufacturing of Active Microsystems - Microtechnology and MEMS 2011 edition

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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

456 pages, 319 black & white illustrations, 33 colour illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 10, 2011
ISBN13 9783642129025
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 444
Dimensions 155 × 235 × 30 mm   ·   748 g
Language French  
Editor Burisch, Arne
Editor Buttgenbach, Stephanus
Editor Hesselbach, Jurgen

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