Design and Manufacturing of Active Microsystems - Microtechnology and MEMS - Stephanus Buttgenbach - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642267383 - March 21, 2014
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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS 2011 edition

Stephanus Buttgenbach

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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS 2011 edition

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

444 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released March 21, 2014
Original release date 2013
ISBN13 9783642267383
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 444
Dimensions 155 × 235 × 24 mm   ·   635 g
Language German  
Editor Burisch, Arne
Editor Buttgenbach, Stephanus
Editor Hesselbach, Jurgen
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